Profilometer

Description

The stylus profilometer Bruker, model DektakXT, is a measuring system to measure a two-dimensional surface's profile, it is used to measure film thickness and to quantify surface roughness.

Specifications

PC-based profilometer equipped with Bruker operation and analysis software
Vertical measurement range: 1 mm
Vertical resolution: 1 Angstrom
Step height repeatability: 4 Angstrom, 1 sigma on steps less than or equal to 1 μm (30 scans using a 12.5 μm stylus)
Stylus radius options: from 50 nm to 25 μm (2 μm and 12.5 μm are available in-house)
Stylus force: from 1 to 15 mg
X-Y stage: 100 mm x 100 mm
Scan length range: from 50 μm to 55 mm
Data points per scan: up to 120,000
Maximum sample thickness: 50 mm
External cover provides acoustic and ESD protection.

Applications

Film thickness measurements
Surface roughness analyses